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| 基于移动相位偏折术的连续镜面反射结构全场三维形貌测量 |
| Full-field 3D morphology measurement of continuous specular objects by translational phase measuring deflectometry |
| 投稿时间：2024-03-19 修订日期：2024-04-24 |
| DOI： |
| 中文关键词: 镜面测量 全场三维形貌 相位偏折术 单目单屏 条纹 |
| 英文关键词:specular measurement full-field 3D morphology phase measuring deflectometry single-camera single-screen fringe |
| 基金项目:国家自然科学基金项目（面上项目，重点项目，重大项目） |
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| 中文摘要: |
| 镜面反射结构的高精度全场形貌测量是众多高端制造领域中不可或缺的重要环节。本文提出一种移动相位偏折术法实现了镜面形貌的高精度测量。该方法以单目单屏为基础,建立了完整的条纹相位-梯度-高度关系模型,并通过表面连续性假设建立了模型中的基本约束条件。提出了一种模型参数的求解方法,解决了传统相位偏折术中存在的二义性问题,能够通过对显示器的简单、任意移动实现被测结构形貌以及位姿的测量。开展一系列验证试验,分别讨论了被测表面梯度、高度变化对方法形貌测量能力的影响,验证了方法的形貌测量综合能力。实验结果表明,在镜面反射结构形貌测量中,该方法相较于传统方法的测量精度显著提升。 |
| 英文摘要: |
| High-precision full-field 3D morphology measurement of specular objects is an indispensable and crucial aspect in various advanced manufacturing industries. In this paper, a novel single-camera single-screen morphology measuring method of specular objects named Translational Phase Measuring Deflectometry (TPMD) is developed, based on Phase Measuring Deflectometry (PMD). The method establishes a complete model between fringe phase, specimen gradient, and height under the single-camera single-screen configuration, and introduces gradient-height relation by surface continuity assumption. By introducing extra phase constraint from arbitrarily moved screen, the method addresses the ambiguity issue in single-camera single-screen PMD and simultaneously solves the relative morphology and absolute position of the measured object. Through three sets of experiments, the influence by objects’ gradient and height to measuring, and method"s capability in reconstructing overall morphology are evaluated. The experimental results demonstrate that the method has the potential to achieve high-precision full-field morphological measurement of arbitrarily-shaped continuous specular objects while maintaining relatively simple in hardware setup and experimental procedures. |
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