| 刘鸿凯,何文远,彭金峰*,郑学军.二维层状氧化锌纳米片的制备与压电性能表征[J].实验力学,2025,40(1):134~142 |
| 二维层状氧化锌纳米片的制备与压电性能表征 |
| Preparation and characterization of two-dimensional layered ZnO nanosheets with ultra-high piezoelectric coefficient |
| 投稿时间：2023-01-19 修订日期：2023-03-05 |
| DOI：10.7520/1001-4888-23-020 |
| 中文关键词: 化学气相沉积法 超声剥离法 二维层状ZnO纳米片 单晶生长 离面压电系数 |
| 英文关键词:chemical vapor deposition ultrasonic stripping method two-dimensional layered ZnO nanosheet single crystal growth out-of-plane piezoelectric coefficient |
| 基金项目:国家自然科学基金重点项目(11832016，12002295);合肥通用机械研究院有限公司项目(20213 ZK 2021010483) |
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| 中文摘要: |
| 二维材料因具有高导电性、光学透明性和机械强度等特性，其压电和压电光电子效应近年来越来越受到关注；为了促进二维材料在微机电系统、纳米机器人和有源柔性电子产品领域的实际应用，开展二维材料的压电性能研究具有重要意义。本文采用原子力显微镜(AFM)对二维层状氧化锌(ZnO)纳米片的反常离面压电效应进行探究。首先，通过化学气相沉积法合成ZnO单晶微米线，将其进行超声剥离制备成二维层状ZnO纳米片；然后利用扫描电子显微镜和透射电子显微镜对ZnO单晶微米线的微观结构、晶体结构和生长取向进行表征；再通过AFM的PFM模块测得二维层状ZnO纳米片振幅-偏置电压类“蝴蝶”曲线和压电系数-偏置电压滞回曲线。结果表明：ZnO单晶微米线具有沿厚度取向［0001］方向的单晶纤锌矿结构； 二维层状ZnO纳米片厚度小于10 nm，同样具有厚度取向为［0001］方向的单晶纤锌矿结构，离面有效压电系数最大可达到48.4 pm/V。 |
| 英文摘要: |
| Two-dimensional (2D) materials have many remarkable properties such as high conductivity, optical transparency and mechanical strength, their piezoelectric and piezoelectric photoelectron effects have attracted more attention, and the study of piezoelectric properties of two-dimensional materials is of great significance for the application of microelectromechanical systems, nanorobots, and active flexible electronic products. In this paper, atomic force microscopy (AFM) was used to investigate the anomalous off-plane piezoelectric effect of two-dimensional layered zinc oxide (ZnO) materials. First, ZnO single crystal microwires were synthesized by chemical vapor deposition, and then they were exfoliated by ultrasonic exfoliation to obtain two-dimensional layered ZnO nanosheets. Subsequently, the microstructure, crystal structure and growth orientation of ZnO single crystal microwires were characterized by scanning electron microscopy, transmission electron microscopy and EBSD. Then, the amplitude-bias voltage butterfly-like curve and the piezoelectric coefficient-bias voltage hysteresis curve were measured by the PFM module of AFM for two-dimensional layered ZnO nanosheets. The results show that ZnO single crystal microwires have a single-crystal wurtzite structure grown along the thickness orientation ［0001］. Two-dimensional layered ZnO nanosheets are of less than 10 nm thick, also have a single-crystal wurtzite structure grown along the thickness orientation ［0001］, and the effective out-of-plane piezoelectric coefficient can reach a maximum of 48.4 pm/V. |
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